A fatal fire at a nitrogen trifluoride (NF₃) facility operated by Japanese industrial gas producer Kanto Denka Kogyo Co. has raised questions over the security of supply for a material central to semiconductor manufacturing.
The incident occurred on 7th August at the company’s Shibukawa plant in Gunma Prefecture, northwest of Tokyo, Bloomberg reported. One worker died and a second was hospitalised.
Local authorities ordered an immediate suspension of operations after the explosion caused partial damage to one of the site’s two production lines. The cause of the fire remains under investigation.
Nitrogen trifluoride is a toxic gas used extensively in semiconductor fabrication to clean and etch silicon wafers. Kanto Denka is one of the world’s largest NF₃ suppliers, serving major chipmakers including TSMC, Samsung Electronics, Micron, Sony, Kioxia, and Japan’s Rapidus.
According to Taiwanese newspaper Commercial Times, repairs to the damaged line and the resumption of shipments could take several months. Both Bloomberg and Nikkan Kogyo Shimbun reported that companies reliant on Kanto Denka’s supply were already taking steps to secure alternatives, with some expressing concern about potential disruption.
Japan’s Ministry of Economy, Trade, and Industry is reportedly assessing options to offset shortages by expanding imports from South Korea.
The fire has highlighted Japan’s growing dependence on Kanto Denka for NF₃. The company produces around 90% of the country’s total supply, and with Mitsui Chemicals planning to exit the market by March 2026 due to rising costs, Kanto Denka was expected to become Japan’s sole major producer.
Analysts also noted that a prolonged disruption in NF₃ production could affect supplies of tungsten hexafluoride (WF₆), a derivative gas used in forming metal wiring in chips.
The situation adds further complexity to the already strained semiconductor supply chain, underscoring the importance of materials security in an industry where disruptions can ripple across global production.
